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Graph of Planar process
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Integrated circuits
MOS integrated circuit
Semiconductor photolithography
Planar process
Silicon transistor
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Integrated circuits
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Planar process
depends on
Early manufacturable approaches to modern monolithic integrated circuits relied on the planar process for device isolation and surface interconnections.
MOS integrated circuit
→
Planar process
evolved from
MOS integrated circuits adopt the planar process's approaches to surface oxidation, masking, and interconnection, while further increasing device density.
Semiconductor photolithography
→
Planar process
enables
Photolithography and masks transfer patterns for surface openings onto wafers, enabling the planar process to repeatedly form protected device regions.
Planar process
→
Silicon transistor
evolved from
The planar process retains a protective silicon dioxide layer, improving manufacturing methods to address reliability problems at the surface junctions of silicon transistors.
Planar process
→
Integrated circuits
applied in
The planar process allows multiple devices to be formed on the surface of the same wafer and provides a flat, protected surface for subsequent metal interconnects.